Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500356 | Selectively etching silicon using fluorine without plasma | William Harshbarger, Kam S. Law | 2002-12-31 |
| 6472329 | Etching aluminum over refractory metal with successive plasmas | Kai-An Wang, Jenny Tran | 2002-10-29 |
| 6451390 | Deposition of TEOS oxide using pulsed RF plasma | Takako Takehara, Carl A. Sorensen, William Harshbarger, Kam S. Law | 2002-09-17 |