Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472329 | Etching aluminum over refractory metal with successive plasmas | Haruhiro Harry Goto, Jenny Tran | 2002-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472329 | Etching aluminum over refractory metal with successive plasmas | Haruhiro Harry Goto, Jenny Tran | 2002-10-29 |