Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432826 | Planarized Cu cleaning for reduced defects | Ramin Emami, Shijian Li, Fred C. Redeker, Madhavi R. Chandrachood | 2002-08-13 |
| 6386955 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Steven M. Zuniga, Manoocher Birang, Hung Chih Chen | 2002-05-14 |
| 6368191 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Steven M. Zuniga, Hung Chih Chen, Manoocher Birang, Kapila Wijekoon | 2002-04-09 |