Issued Patents 2002
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494774 | Carrier head with pressure transfer mechanism | Steven M. Zuniga | 2002-12-17 |
| 6450868 | Carrier head with multi-part flexible membrane | Steven M. Zuniga, Ming Kuie Tseng | 2002-09-17 |
| 6436228 | Substrate retainer | Steven M. Zuniga | 2002-08-20 |
| 6436828 | Chemical mechanical polishing using magnetic force | Steven M. Zuniga | 2002-08-20 |
| 6431968 | Carrier head with a compressible film | Steven M. Zuniga | 2002-08-13 |
| 6406361 | Carrier head for chemical mechanical polishing | Steven M. Zuniga | 2002-06-18 |
| 6390908 | Determining when to replace a retaining ring used in substrate polishing operations | Steven M. Zuniga, Bret W. Adams, Manoocher Birang, Kean Chew | 2002-05-21 |
| 6386955 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Steven M. Zuniga, Manoocher Birang, Sen-Hou Ko | 2002-05-14 |
| 6368191 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Steven M. Zuniga, Manoocher Birang, Kapila Wijekoon, Sen-Hou Ko | 2002-04-09 |
| 6361420 | Method of chemical mechanical polishing with edge control | Steven M. Zuniga, Gopalakrishna B. Prabhu | 2002-03-26 |