Issued Patents 2002
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494774 | Carrier head with pressure transfer mechanism | Hung Chih Chen | 2002-12-17 |
| 6450868 | Carrier head with multi-part flexible membrane | Hung Chih Chen, Ming Kuie Tseng | 2002-09-17 |
| 6436828 | Chemical mechanical polishing using magnetic force | Hung Chih Chen | 2002-08-20 |
| 6436228 | Substrate retainer | Hung Chih Chen | 2002-08-20 |
| 6431968 | Carrier head with a compressible film | Hung Chih Chen | 2002-08-13 |
| 6422927 | Carrier head with controllable pressure and loading area for chemical mechanical polishing | — | 2002-07-23 |
| 6406361 | Carrier head for chemical mechanical polishing | Hung Chih Chen | 2002-06-18 |
| 6398621 | Carrier head with a substrate sensor | Ming-Kuei Tseng | 2002-06-04 |
| 6390908 | Determining when to replace a retaining ring used in substrate polishing operations | Hung Chih Chen, Bret W. Adams, Manoocher Birang, Kean Chew | 2002-05-21 |
| 6386955 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Manoocher Birang, Hung Chih Chen, Sen-Hou Ko | 2002-05-14 |
| 6368191 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Hung Chih Chen, Manoocher Birang, Kapila Wijekoon, Sen-Hou Ko | 2002-04-09 |
| 6361420 | Method of chemical mechanical polishing with edge control | Hung Chih Chen, Gopalakrishna B. Prabhu | 2002-03-26 |
| 6361419 | Carrier head with controllable edge pressure | Gopalakrishna B. Prahbu, Steven T. Mear | 2002-03-26 |
| 6358121 | Carrier head with a flexible membrane and an edge load ring | — | 2002-03-19 |