Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6439964 | Method of controlling a polishing machine | Gopalakrishna B. Prahbu | 2002-08-27 |
| 6361419 | Carrier head with controllable edge pressure | Steven M. Zuniga, Gopalakrishna B. Prahbu | 2002-03-26 |