Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6390908 | Determining when to replace a retaining ring used in substrate polishing operations | Hung Chih Chen, Steven M. Zuniga, Manoocher Birang, Kean Chew | 2002-05-21 |
| 6352467 | Integrated electrodeposition and chemical mechanical polishing tool | Sasson Somekh, Debabrata Ghosh | 2002-03-05 |