Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368191 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Steven M. Zuniga, Hung Chih Chen, Manoocher Birang, Sen-Hou Ko | 2002-04-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368191 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Steven M. Zuniga, Hung Chih Chen, Manoocher Birang, Sen-Hou Ko | 2002-04-09 |