Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482072 | Method and apparatus for providing and controlling delivery of a web of polishing material | Jayakumar Gurusamy, Lawrence Rosenberg | 2002-11-19 |
| 6419559 | Using a purge gas in a chemical mechanical polishing apparatus with an incrementally advanceable polishing sheet | Jayakumar Gurusamy | 2002-07-16 |
| 6358124 | Pad conditioner cleaning apparatus | Raijiro Koga, Hiromi Tsuruta, Takashi Kumagai, Brian J. Brown, Boris Fishkin +5 more | 2002-03-19 |