Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6386963 | Conditioning disk for conditioning a polishing pad | Suzuki Kenji | 2002-05-14 |
| 6358124 | Pad conditioner cleaning apparatus | Hiromi Tsuruta, Takashi Kumagai, Gee Sun Hoey, Brian J. Brown, Boris Fishkin +5 more | 2002-03-19 |