Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468362 | Method and apparatus for cleaning/drying hydrophobic wafers | Youfel Chen, Brian J. Brown, Fred C. Redeker | 2002-10-22 |
| 6464799 | Method for managing a fluid level associated with a substrate processing tank | Alexander Lerner, Brian J. Brown, Jonathan Frankel | 2002-10-15 |
| 6460551 | Megasonic resonator for disk cleaning and method for use thereof | Alexander Lerner, Jianshe Tang, Brian J. Brown | 2002-10-08 |
| 6412499 | Continuous cleaning megasonic tank with reduced duty cycle transducers | Jianshe Tang, Brian J. Brown | 2002-07-02 |
| 6358124 | Pad conditioner cleaning apparatus | Raijiro Koga, Hiromi Tsuruta, Takashi Kumagai, Gee Sun Hoey, Brian J. Brown +5 more | 2002-03-19 |
| 6352403 | Controlled environment enclosure and mechanical interface | Seiji Sato, Robert B. Lowrance | 2002-03-05 |
| 6345630 | Method and apparatus for cleaning the edge of a thin disc | Jianshe Tang, Brian J. Brown | 2002-02-12 |