Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6460551 | Megasonic resonator for disk cleaning and method for use thereof | Boris Fishkin, Alexander Lerner, Brian J. Brown | 2002-10-08 |
| 6412499 | Continuous cleaning megasonic tank with reduced duty cycle transducers | Brian J. Brown, Boris Fishkin | 2002-07-02 |
| 6345630 | Method and apparatus for cleaning the edge of a thin disc | Boris Fishkin, Brian J. Brown | 2002-02-12 |