Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464799 | Method for managing a fluid level associated with a substrate processing tank | Brian J. Brown, Boris Fishkin, Jonathan Frankel | 2002-10-15 |
| 6460551 | Megasonic resonator for disk cleaning and method for use thereof | Boris Fishkin, Jianshe Tang, Brian J. Brown | 2002-10-08 |
| 6412503 | Magnetically coupled substrate roller | Manoocher Birang | 2002-07-02 |