Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478937 | Substrate holder system with substrate extension apparatus and associated method | Jayant Lakshmikanthan | 2002-11-12 |
| 6454927 | Apparatus and method for electro chemical deposition | Joseph Stevens, Yevgeniy Rabinovich, Sandy Chao, Mark Denome, Allen L. D'Ambra | 2002-09-24 |
| 6440261 | Dual buffer chamber cluster tool for semiconductor wafer processing | Avi Tepman, Allen L. D'Ambra | 2002-08-27 |
| 6432282 | Method and apparatus for supplying electricity uniformly to a workpiece | Shamouil Shamouilian, Anada H. Kumar, Joseph Stevens, Ricardo Leon, Jon Clinton | 2002-08-13 |
| 6369493 | Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket | Dmitry Lubomirsky, Harald Herchen, Simon Yavelberg, David Palagashvili | 2002-04-09 |