Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444040 | Gas distribution plate | Harald Herchen, Dmitry Lubomirsky, Alex Schreiber | 2002-09-03 |
| 6369493 | Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket | Dmitry Lubomirsky, Harald Herchen, Simon Yavelberg, Donald Olgado | 2002-04-09 |