Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6466426 | Method and apparatus for thermal control of a semiconductor substrate | Yeuk-Fai Edwin Mok, Dennis Koosau, Danny D. WANG, Senh Thach, Paul Exline | 2002-10-15 |
| 6449871 | Semiconductor process chamber having improved gas distributor | Arnold Kholodenko, Guang-Jye Shiau, Peter Loewenhardt, Shamouil Shamouilian | 2002-09-17 |
| 6444040 | Gas distribution plate | Harald Herchen, David Palagashvili, Alex Schreiber | 2002-09-03 |
| 6369493 | Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket | Harald Herchen, Simon Yavelberg, David Palagashvili, Donald Olgado | 2002-04-09 |