Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6466426 | Method and apparatus for thermal control of a semiconductor substrate | Yeuk-Fai Edwin Mok, Dmitry Lubomirsky, Dennis Koosau, Danny D. WANG, Senh Thach | 2002-10-15 |
PE
Paul Exline
Overall (2002): #266,118 of 266,432Top 100%
1
Patents 2002