Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6367410 | Closed-loop dome thermal control apparatus for a semiconductor wafer processing system | Patrick Leahey, Jerry Chen, Richard E. Remington, Timothy D. Driscoll, Robert E. Ryan +3 more | 2002-04-09 |
| 6369493 | Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket | Dmitry Lubomirsky, Harald Herchen, David Palagashvili, Donald Olgado | 2002-04-09 |