Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472351 | Herbicide | Sandra Morris | 2002-10-29 |
| 6447636 | Plasma reactor with dynamic RF inductive and capacitive coupling control | Xue-Yu Qian, Zhi-Wen Sun, Maocheng Li, John Holland, Arthur H. Sato +2 more | 2002-09-10 |
| 6447637 | Process chamber having a voltage distribution electrode | Valentin Todorov, Arthur H. Sato, Jin-Yuan Chen, Xueyu Qian, Zhiwen Sun | 2002-09-10 |
| 6367410 | Closed-loop dome thermal control apparatus for a semiconductor wafer processing system | Patrick Leahey, Jerry Chen, Richard E. Remington, Simon Yavelberg, Timothy D. Driscoll +3 more | 2002-04-09 |
| 6352702 | Antimicrobial composition | Sandra Morris | 2002-03-05 |