Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447636 | Plasma reactor with dynamic RF inductive and capacitive coupling control | Xue-Yu Qian, Zhi-Wen Sun, John Holland, Arthur H. Sato, Valentin Todorov +2 more | 2002-09-10 |
| 6380095 | Silicon trench etch using silicon-containing precursors to reduce or avoid mask erosion | Wei Liu, Yiqiong Wang, Anisul Khan, Shaoher X. Pan, Dragan Podlesnik | 2002-04-30 |