Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6380095 | Silicon trench etch using silicon-containing precursors to reduce or avoid mask erosion | Wei Liu, Maocheng Li, Anisul Khan, Shaoher X. Pan, Dragan Podlesnik | 2002-04-30 |