Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491835 | Metal mask etching of silicon | Ajay Kumar, Wei Liu, John Chao, Jeff Chinn | 2002-12-10 |
| 6471833 | High etch rate method for plasma etching silicon nitride | Ajay Kumar, Jeffrey D. Chin, Dragan Podlesnik | 2002-10-29 |
| 6391788 | Two etchant etch method | Ajay Kumar, Jeffrey D. Chinn, Dragan Podlesnik | 2002-05-21 |
| 6380095 | Silicon trench etch using silicon-containing precursors to reduce or avoid mask erosion | Wei Liu, Yiqiong Wang, Maocheng Li, Shaoher X. Pan, Dragan Podlesnik | 2002-04-30 |
| 6372655 | Two etchant etch method | Ajay Kumar, Jeffrey D. Chinn, Dragan Podlesnik | 2002-04-16 |