Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491835 | Metal mask etching of silicon | Ajay Kumar, Anisul Khan, John Chao, Jeff Chinn | 2002-12-10 |
| 6458671 | Method of providing a shallow trench in a deep-trench device | David Mui | 2002-10-01 |
| 6380095 | Silicon trench etch using silicon-containing precursors to reduce or avoid mask erosion | Yiqiong Wang, Maocheng Li, Anisul Khan, Shaoher X. Pan, Dragan Podlesnik | 2002-04-30 |