Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491835 | Metal mask etching of silicon | Ajay Kumar, Anisul Khan, Wei Liu, John Chao | 2002-12-10 |
| 6402974 | Method for etching polysilicon to have a smooth surface | Jitske Trevor, Shashank Deshmukh | 2002-06-11 |