Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471833 | High etch rate method for plasma etching silicon nitride | Ajay Kumar, Anisul Khan, Dragan Podlesnik | 2002-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471833 | High etch rate method for plasma etching silicon nitride | Ajay Kumar, Anisul Khan, Dragan Podlesnik | 2002-10-29 |