Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472822 | Pulsed RF power delivery for plasma processing | Jin-Yuan Chen, Arthur H. Sato, Valentin N. Todorow | 2002-10-29 |
| 6462481 | Plasma reactor having a symmetric parallel conductor coil antenna | Valentin N. Todorow, Michael Barnes | 2002-10-08 |
| 6447636 | Plasma reactor with dynamic RF inductive and capacitive coupling control | Xue-Yu Qian, Zhi-Wen Sun, Maocheng Li, Arthur H. Sato, Valentin Todorov +2 more | 2002-09-10 |
| 6414648 | Plasma reactor having a symmetric parallel conductor coil antenna | Valentin N. Todorow, Michael Barnes | 2002-07-02 |
| 6409933 | Plasma reactor having a symmetric parallel conductor coil antenna | Valentin N. Todorow, Michael Barnes | 2002-06-25 |
| 6399507 | Stable plasma process for etching of films | Padmapani Nallan, Valentin Todorov, Thorsten Lill | 2002-06-04 |
| 6344151 | Gas purge protection of sensors and windows in a gas phase processing reactor | Anthony Chen | 2002-02-05 |