Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462481 | Plasma reactor having a symmetric parallel conductor coil antenna | John Holland, Valentin N. Todorow | 2002-10-08 |
| 6414648 | Plasma reactor having a symmetric parallel conductor coil antenna | John Holland, Valentin N. Todorow | 2002-07-02 |
| 6409933 | Plasma reactor having a symmetric parallel conductor coil antenna | John Holland, Valentin N. Todorow | 2002-06-25 |
| 6364958 | Plasma assisted semiconductor substrate processing chamber having a plurality of ground path bridges | Canfeng Lai, Michael S. Cox, Lily Pang | 2002-04-02 |
| 6361645 | Method and device for compensating wafer bias in a plasma processing chamber | Alan M. Schoepp, Robert Knop, Christopher H. Olson, Tuan Ngo | 2002-03-26 |
| RE37580 | Guard ring electrostatic chuck | John H. Keller, Joseph S. Logan, Robert E. Tompkins, Robert P. Westerfield, Jr. | 2002-03-12 |
| 6348725 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2002-02-19 |
| RE37541 | Electrostatic chuck with reference electrode | John H. Keller, Joseph S. Logan, Robert E. Tompkins, Robert P. Westerfield, Jr. | 2002-02-05 |