Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464843 | Contamination controlling method and apparatus for a plasma processing chamber | Thomas E. Wicker, Robert A. Maraschin | 2002-10-15 |
| 6377437 | High temperature electrostatic chuck | Greg Sexton, Mark Kennard | 2002-04-23 |
| 6361645 | Method and device for compensating wafer bias in a plasma processing chamber | Robert Knop, Christopher H. Olson, Michael Barnes, Tuan Ngo | 2002-03-26 |
| 6341574 | Plasma processing systems | Andrew D. Bailey, III, David Hemker, Mark Wilcoxson, Andras Kuthi | 2002-01-29 |