Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464843 | Contamination controlling method and apparatus for a plasma processing chamber | Thomas E. Wicker, Alan M. Schoepp | 2002-10-15 |
| 6408786 | Semiconductor processing equipment having tiled ceramic liner | William S. Kennedy, Jerome S. Hubacek | 2002-06-25 |
| 6394026 | Low contamination high density plasma etch chambers and methods for making the same | Thomas E. Wicker, William S. Kennedy | 2002-05-28 |