Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6408786 | Semiconductor processing equipment having tiled ceramic liner | Robert A. Maraschin, Jerome S. Hubacek | 2002-06-25 |
| 6394026 | Low contamination high density plasma etch chambers and methods for making the same | Thomas E. Wicker, Robert A. Maraschin | 2002-05-28 |
| 6376385 | Method of manufacturing assembly for plasma reaction chamber and use thereof | John Lilleland, Jerome S. Hubacek | 2002-04-23 |