Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475336 | Electrostatically clamped edge ring for plasma processing | — | 2002-11-05 |
| 6451157 | Gas distribution apparatus for semiconductor processing | — | 2002-09-17 |
| 6408786 | Semiconductor processing equipment having tiled ceramic liner | William S. Kennedy, Robert A. Maraschin | 2002-06-25 |
| 6376385 | Method of manufacturing assembly for plasma reaction chamber and use thereof | John Lilleland, William S. Kennedy | 2002-04-23 |