Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6463875 | Multiple coil antenna for inductively-coupled plasma generation systems | Jian J. Chen, Robert Veltrop | 2002-10-15 |
| 6464843 | Contamination controlling method and apparatus for a plasma processing chamber | Alan M. Schoepp, Robert A. Maraschin | 2002-10-15 |
| 6394026 | Low contamination high density plasma etch chambers and methods for making the same | Robert A. Maraschin, William S. Kennedy | 2002-05-28 |