Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6463875 | Multiple coil antenna for inductively-coupled plasma generation systems | Jian J. Chen, Thomas E. Wicker | 2002-10-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6463875 | Multiple coil antenna for inductively-coupled plasma generation systems | Jian J. Chen, Thomas E. Wicker | 2002-10-15 |