Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6377437 | High temperature electrostatic chuck | Mark Kennard, Alan M. Schoepp | 2002-04-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6377437 | High temperature electrostatic chuck | Mark Kennard, Alan M. Schoepp | 2002-04-23 |