Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6361645 | Method and device for compensating wafer bias in a plasma processing chamber | Alan M. Schoepp, Robert Knop, Christopher H. Olson, Michael Barnes | 2002-03-26 |
TN
Tuan Ngo
Overall (2002): #97,274 of 266,432Top 40%
1
Patents 2002