Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472822 | Pulsed RF power delivery for plasma processing | Jin-Yuan Chen, John Holland, Arthur H. Sato | 2002-10-29 |
| 6462481 | Plasma reactor having a symmetric parallel conductor coil antenna | John Holland, Michael Barnes | 2002-10-08 |
| 6414648 | Plasma reactor having a symmetric parallel conductor coil antenna | John Holland, Michael Barnes | 2002-07-02 |
| 6409933 | Plasma reactor having a symmetric parallel conductor coil antenna | John Holland, Michael Barnes | 2002-06-25 |