Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472822 | Pulsed RF power delivery for plasma processing | John Holland, Arthur H. Sato, Valentin N. Todorow | 2002-10-29 |
| 6447637 | Process chamber having a voltage distribution electrode | Valentin Todorov, Robert E. Ryan, Arthur H. Sato, Xueyu Qian, Zhiwen Sun | 2002-09-10 |