Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447637 | Process chamber having a voltage distribution electrode | Valentin Todorov, Robert E. Ryan, Arthur H. Sato, Jin-Yuan Chen, Xueyu Qian | 2002-09-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447637 | Process chamber having a voltage distribution electrode | Valentin Todorov, Robert E. Ryan, Arthur H. Sato, Jin-Yuan Chen, Xueyu Qian | 2002-09-10 |