Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE37580 | Guard ring electrostatic chuck | Michael Barnes, John H. Keller, Robert E. Tompkins, Robert P. Westerfield, Jr. | 2002-03-12 |
| RE37541 | Electrostatic chuck with reference electrode | Michael Barnes, John H. Keller, Robert E. Tompkins, Robert P. Westerfield, Jr. | 2002-02-05 |