Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413359 | Plasma reactor with high selectivity and reduced damage | — | 2002-07-02 |
| RE37580 | Guard ring electrostatic chuck | Michael Barnes, Joseph S. Logan, Robert E. Tompkins, Robert P. Westerfield, Jr. | 2002-03-12 |
| RE37541 | Electrostatic chuck with reference electrode | Michael Barnes, Joseph S. Logan, Robert E. Tompkins, Robert P. Westerfield, Jr. | 2002-02-05 |