Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440870 | Method of etching tungsten or tungsten nitride electrode gates in semiconductor structures | Hakeem Oluseyi | 2002-08-27 |
| 6423644 | Method of etching tungsten or tungsten nitride electrode gates in semiconductor structures | Hakeem Oluseyi | 2002-07-23 |
| 6415198 | Plasma etching of silicon using a chlorine chemistry augmented with sulfur dioxide | Ajay Kumar, Jeffrey D. Chinn | 2002-07-02 |
| 6399507 | Stable plasma process for etching of films | John Holland, Valentin Todorov, Thorsten Lill | 2002-06-04 |
| 6368978 | Hydrogen-free method of plasma etching indium tin oxide | Ajay Kumar, Jeffrey D. Chinn | 2002-04-09 |