Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440870 | Method of etching tungsten or tungsten nitride electrode gates in semiconductor structures | Padmapani Nallan | 2002-08-27 |
| 6423644 | Method of etching tungsten or tungsten nitride electrode gates in semiconductor structures | Padmapani Nallan | 2002-07-23 |