Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406924 | Endpoint detection in the fabrication of electronic devices | Michael N. Grimbergen | 2002-06-18 |
| 6399507 | Stable plasma process for etching of films | Padmapani Nallan, John Holland, Valentin Todorov | 2002-06-04 |