Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406924 | Endpoint detection in the fabrication of electronic devices | Thorsten Lill | 2002-06-18 |
| 6390019 | Chamber having improved process monitoring window | Xue-Yu Qian | 2002-05-21 |
| 6352049 | Plasma assisted processing chamber with separate control of species density | Gerald Yin, Arnold Kolandenko, Hong Ching Shan, Peter Loewenhardt, Chii Guang Lee +9 more | 2002-03-05 |