Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352049 | Plasma assisted processing chamber with separate control of species density | Gerald Yin, Hong Ching Shan, Peter Loewenhardt, Chii Guang Lee, Yan Ye +9 more | 2002-03-05 |