Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471822 | Magnetically enhanced inductively coupled plasma reactor with magnetically confined plasma | Gerald Yin, Peter Loewenhardt, Arnold Kholodenko, Hong Chin Shan, Dan Katz | 2002-10-29 |
| 6352049 | Plasma assisted processing chamber with separate control of species density | Gerald Yin, Arnold Kolandenko, Hong Ching Shan, Peter Loewenhardt, Yan Ye +9 more | 2002-03-05 |