Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447636 | Plasma reactor with dynamic RF inductive and capacitive coupling control | Xue-Yu Qian, Maocheng Li, John Holland, Arthur H. Sato, Valentin Todorov +2 more | 2002-09-10 |
| 6379575 | Treatment of etching chambers using activated cleaning gas | Gerald Yin, Xue-Yu Qian, Patrick Leahey, Jonathan D. Mohn, Waiching Chow +2 more | 2002-04-30 |