Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6401652 | Plasma reactor inductive coil antenna with flat surface facing the plasma | Arthur H. Sato, Kien N. Chuc | 2002-06-11 |
| 6379575 | Treatment of etching chambers using activated cleaning gas | Gerald Yin, Xue-Yu Qian, Patrick Leahey, Waiching Chow, Arthur Y. Chen +2 more | 2002-04-30 |