Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447636 | Plasma reactor with dynamic RF inductive and capacitive coupling control | Xue-Yu Qian, Zhi-Wen Sun, Maocheng Li, John Holland, Arthur H. Sato +2 more | 2002-09-10 |
| 6379575 | Treatment of etching chambers using activated cleaning gas | Gerald Yin, Xue-Yu Qian, Jonathan D. Mohn, Waiching Chow, Arthur Y. Chen +2 more | 2002-04-30 |
| 6367410 | Closed-loop dome thermal control apparatus for a semiconductor wafer processing system | Jerry Chen, Richard E. Remington, Simon Yavelberg, Timothy D. Driscoll, Robert E. Ryan +3 more | 2002-04-09 |