Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454927 | Apparatus and method for electro chemical deposition | Joseph Stevens, Yevgeniy Rabinovich, Sandy Chao, Allen L. D'Ambra, Donald Olgado | 2002-09-24 |
| 6416647 | Electro-chemical deposition cell for face-up processing of single semiconductor substrates | Yezdi Dordi, Joe Stevens, Roy Edwards, Bob Lowrance, Michael Sugarman | 2002-07-09 |